Subsurface microscopy of integrated circuits with angular spectrum and polarization control.

نویسندگان

F H Köklü

S B Ippolito

B B Goldberg

M S Unlü

چکیده

We investigate the effect of an annular pupil-plane aperture in confocal imaging while using an NA increasing lens. We show that focal spot shape is highly sensitive to both polarization and angular spectrum of the incoming light. We demonstrate a lateral spatial resolution of 145 nm (lambda(0)/9) in the direction perpendicular to the polarization direction.

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Design of Photonic Crystal Polarization Splitter on InP Substrate

In this article, we suggested a novel design of polarization splitter based on coupler waveguide on InP substrate at 1.55mm wavelength. Photonic crystal structure is consisted of two dimensional (2D) air holes embedded in InP/InGaAsP material with an effective refractive index of 3.2634 which is arranged in a hexagonal lattice. The photonic band gap (PBG) of this structure is determined using t...

متن کامل

High spatial resolution subsurface microscopy

We present a high-spatial-resolution subsurface microscopy technique that significantly increases the numerical aperture of a microscope without introducing an additional spherical aberration. Consequently, the diffraction-limited spatial resolution is improved beyond the limit of standard subsurface microscopy. By realizing a numerical aperture of 3.4, we experimentally demonstrate a lateral s...

متن کامل

Widefield subsurface microscopy of integrated circuits.

We apply the numerical aperture increasing lens technique to widefield subsurface imaging of silicon integrated circuits. We demonstrate lateral and longitudinal resolutions well beyond the limits of conventional backside imaging. With a simple infrared widefield microscope (lambda(0) = 1.2 microm), we demonstrate a lateral spatial resolution of 0.26 microm (0.22 lambda(0)) and a longitudinal r...

متن کامل

Design and Development of High Gain, Low Profile and Circularly Polarized Cavity-backed Slot Antennas Using High-order Modes of Square Shaped Substrtae Integrated Waveguide Resonator

In In this paper, two low profile, single fed cavity backed slot antennas providing a circularly polarized (CP) wave are introduced. One of the antennas presents a right-handed CP (RHCP) wave, while the other one offers a left handed CP (LHCP) wave. The proposed antennas consist of a square shaped Substrtae Integrated Waveguide (SIW) cavity incorporatng two couples of radiating slots to radiate...

متن کامل